XY piezo motor positioner stage with linearĮncoder, 0.1 µm resolution, self locking at rest To 250 mm/s, 0.1 µm resolution, self locking at rest Smallest piezo motor positioning stage with linear encoder and Linear Stages with Ultrasonic Piezo Linear Motors PiezoWalk® Networkable Controller/Driver for NEXACT® Linear Motors and Positioners Piezocontroller for NEXLINE ® nano-drive, 32-bit digital filters, 24-bit DAC resolution

More Information on Mult-Axis Positioners Non-Magnetic Piezo Hexapod Precision Positioning System Miniature Piezo Motor Positioner, piezo walk® drive, self locking at restįast Focus Z-Drive with NEXACT® Linear Piezo Motor, self locking at rest More Info: High-Load PiezoWalk Linear Motors NEXLINE ® PiezoWalk ® high-load linear motor / nanopositioning actuator, subnanometer resolution, self locking at rest. More Info: High Force PiezoWalk Linear Motors NEXLINE ® PiezoWalk ® motor nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest. PiezoWalk NEXACT ® Ultra-compact nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest. More Information on PiezoWalk Linear Motors NEXACT ® linear actuator, nanomanipulator, piezo stepper, self locking at rest PiezoWalk Linear Motors (Piezo-Step Motors) More Info: Compact Piezo Rotary Motor StagesĬompact Piezo-Mike Screw Actuator, Self Locking, Based on Stick-Slip Effect, Vacuum OptionĬompact OEM Linear Motor Actuators, Self Locking, Based on Stick-Slip Effect, Vacuum Option Mini Rotation Stage, Stick-Slip Piezo Motor More Info: Small Stages with Piezo Inertia Motors Stick Slip Piezo Motors / Inertial MotorsĬompact Positioning Stage, self locking, based on the stick-slip effect, Vacuum Option Stick-Slip, Ultrasonic and Stepping Piezo Motors, More Information and Links to Applications. Other Linear Motors based Magnetic Drive Technologies are also available for automation purposes.Īll piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry. Read Stick-Slip Performance Article.įlexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds. They are usually driven in step mode and PI motors run quietly at ulrasonic frequencies, however non-resonant. Piezo Stick-Slip motors (piezo inertial motors) are somewhat in between the ultrasonic motors and stepping motors. Piezo-Walk motors (piezo stepping motors) can achieve much higher forces and picometer range resolution but are not as fast. Ultrasonic resonant motors (PILine ®) are characterized by very high acceleration and speed to 800 mm/sec and feature a compact and relatively simple design. All three are self-clamping at rest and basically provide unlimited travel, yet they are very different in their design, specifications and performance. PI currently manufactures several basic types of piezoelectric motors: Ultrasonic motors (resonant motors), piezo stepper motors (PiezoWalk ®) and intertial motors. These compact, energy-efficient mechatronic mechanisms can be employed in precision motion control, replacing electrodynamic motors. Piezo motors are based on the piezoelectric effect.

Stick-Slip (Inertia) Piezo Motor Principle High Speed Ultrasonic Piezo Linear Motor Drive

Ultra sonic piezo actuator